Electronic package and method for fabricating the same

ABSTRACT

An electronic package and a method for fabricating the same are provided. The method includes: forming a circuit structure on an encapsulant; embedding a first electronic component and a plurality of conductive posts in the encapsulant; and disposing a second electronic component on the circuit structure. Since the first and second electronic components are arranged on opposite sides of the circuit structure, the electronic package can provide multi-function and high efficiency.

BACKGROUND 1. Technical Field

The present disclosure relates to packaging processes, and, moreparticularly, to an electronic package having a plurality of chips and amethod for fabricating the electronic package.

2. Description of Related Art

Along with the rapid development of electronic industries, electronicproducts are developed toward the trend of multi-function and highperformance. Accordingly, wafer level packaging (WLP) technologies havebeen developed to meet the miniaturization requirement of electronicpackages.

FIGS. 1A to 1E are schematic cross-sectional views showing a method forfabricating a semiconductor package 1 using WLP technologies accordingto the prior art.

Referring to FIG. 1A, a thermal release tape 100 is formed on a carrier10.

Then, a plurality of semiconductor elements 11 are disposed on thethermal release tape 100. Each of the semiconductor elements 11 has anactive surface 11 a with a plurality of electrode pads 110 disposedthereon and an inactive surface 11 b opposite to the active surface 11a. The semiconductor elements 11 are attached to the thermal releasetape 100 via the active surfaces 11 a thereof.

Referring to FIG. 1B, an encapsulant 14 is formed on the thermal releasetape 100 to encapsulate the semiconductor elements 11.

Referring to FIG. 1C, a baking process is performed to cure the thermalrelease tape 100. As such, the thermal release tape 100 and the carrier10 are removed to expose the active surfaces 11 a of the semiconductorelements 11.

Referring to FIG. 1D, a circuit structure 16 is formed on theencapsulant 14 and the active surfaces 11 a of the semiconductorelements 11 and electrically connected to the electrode pads 110 of thesemiconductor elements 11. Then, an insulating layer 18 is formed on thecircuit structure 16. A portion of the surface of the circuit structure16 is exposed from the insulating layer 18 so as for a plurality ofconductive elements 17, such as solder balls, to be mounted thereon.

Referring to FIG. 1E, a singulation process is performed along cuttingpaths L of FIG. 1D. As such, a plurality of semiconductor packages 1 areobtained.

However, since the semiconductor elements 11 are disposed on a singleside of the circuit structure 16, the function and efficiency of thesemiconductor packages 1 are limited. Therefore, the function andefficiency of the end electronic products are limited.

Therefore, how to overcome the above-described drawbacks has becomecritical.

SUMMARY

In view of the above-described drawbacks, the present disclosureprovides an electronic package, which comprises: a first encapsulanthaving a first surface and a second surface opposite to the firstsurface; a first electronic component embedded in the first encapsulant;a plurality of conductive posts embedded in the first encapsulant; afirst circuit structure disposed on the first surface of the firstencapsulant and electrically connected to the conductive posts; aplurality of first conductive elements disposed on the first circuitstructure; a second circuit structure disposed on the second surface ofthe first encapsulant and electrically connected to the conductive postsand the first electronic component; and a second electronic componentdisposed on and electrically connected to the second circuit structure.

The present disclosure further provides a method for fabricating anelectronic package, which comprises: providing a first encapsulanthaving a first surface and a second surface opposite to the firstsurface and embedding a first electronic component and a plurality ofconductive posts in the first encapsulant; disposing a first circuitstructure on the first surface of the first encapsulant and electricallyconnecting the first circuit structure to the conductive posts;disposing a plurality of first conductive elements on the first circuitstructure; disposing a second circuit structure on the second surface ofthe first encapsulant and electrically connecting the second circuitstructure to the conductive posts and the first electronic component;and disposing a second electronic component on the second circuitstructure and electrically connecting the second electronic component tothe second circuit structure.

In an embodiment, end surfaces of the conductive posts are flush with atleast one of the first surface and the second surface of the firstencapsulant. In another embodiment, end surfaces of the conductive postsare flush with the first surface or the second surface of the firstencapsulant.

In an embodiment, a surface of the first electronic component is flushwith at least one of the first surface and the second surface of thefirst encapsulant. In another embodiment, a surface of the firstelectronic component is flush with the first surface or the secondsurface of the first encapsulant.

In an embodiment, the first circuit structure is free from beingelectrically connected to the first electronic component.

In an embodiment, the second electronic component is disposed on thesecond circuit structure through a plurality of second conductiveelements. In another embodiment, an underfill is formed between thesecond circuit structure and the second electronic component forencapsulating the second conductive elements.

In an embodiment, a second encapsulant is formed on the second circuitstructure for encapsulating the second electronic component.

In an embodiment, the first electronic component is electricallyconnected to the second circuit structure through a plurality ofconductors.

In an embodiment, before the second electronic component is disposed onthe second circuit structure, a packaging substrate is disposed on thefirst conductive elements.

According to the present disclosure, since the first electroniccomponent and the second electronic component are arranged on upper andlower sides of the second circuit structure, respectively, theelectronic package can provide multi-function and high efficiency.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1E are schematic cross-sectional views showing a method forfabricating a semiconductor package according to the prior art;

FIGS. 2A to 2F are schematic cross-sectional views showing a method forfabricating an electronic package according to a first embodiment of thepresent disclosure;

FIGS. 3A to 3D are schematic cross-sectional views showing a method forfabricating an electronic package according to a second embodiment ofthe present disclosure, wherein FIG. 3A′ is a schematic cross-sectionalview showing a pre-process of FIG. 3A; and

FIGS. 4A to 4D are schematic cross-sectional views showing a method forfabricating an electronic package according to a third embodiment of thepresent disclosure.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The following illustrative embodiments are provided to illustrate thedisclosure of the present disclosure, these and other advantages andeffects can be apparent to those in the art after reading thisspecification.

It should be noted that all the drawings are not intended to limit thepresent disclosure. Various modifications and variations can be madewithout departing from the spirit of the present disclosure. Further,terms such as “first”, “second”, “on”, “a” etc. are merely forillustrative purposes and should not be construed to limit the scope ofthe present disclosure.

FIGS. 2A to 2F are schematic cross-sectional views showing a method forfabricating an electronic package 2 according to a first embodiment ofthe present disclosure.

Referring to FIG. 2A, a first carrier 8 a is provided, a plurality ofconductive posts 24 are disposed on the first carrier 8 a, and at leasta first electronic component 20 is disposed on the first carrier 8 a.Then, a first encapsulant 23 is formed on the first carrier 8 a toencapsulate the conductive posts 24 and the first electronic component20, such that the conductive posts 24 and the first electronic component20 are embedded in the encapsulant 23.

In an embodiment, the first carrier 8 a includes a plate 80 made of, forexample, a semiconductor material, a dielectric material, ceramic, glassor metal. In another embodiment, the first carrier 8 a can be a wafer orfull-panel type substrate according to the practical need. In yetanother embodiment, the first carrier 8 a further includes a bondinglayer 81 made of, for example, a release film or an adhesive. Thebonding layer 81 is formed on the plate 80 by coating or attachment.

The first electronic component 20 is an active element, such as asemiconductor chip, a passive element, such as a resistor, a capacitoror an inductor, or a combination thereof. In an embodiment, the firstelectronic component 20 is a semiconductor chip having an active surface20 a with a plurality of electrode pads 200 disposed thereon and aninactive surface 20 b opposite to the active surface 20 a. The firstelectronic component 20 is bonded to the bonding layer 81 though theactive surface 20 a thereof.

The first encapsulant 23 has a first surface 23 a and a second surface23 b opposite to the first surface 23 a. Each of the conductive posts 24has a first end 24 a exposed from the first surface 23 a of the firstencapsulant 23 and a second end 24 b opposite to the first end 24 a andbonded to the bonding layer 81 of the first carrier 8 a. In anembodiment, the first encapsulant 23 is made of an insulating material,such as polyimide, a dry film, an epoxy resin or a molding compound. Inanother embodiment, the first encapsulant 23 is formed on the bondinglayer 81 through injection, lamination or molding.

Further, a leveling process is performed to cause the inactive surface20 b of the first electronic component 20 and the first ends 24 a of theconductive posts 24 to be flush with the first surface 23 a of the firstencapsulant 23. In an embodiment, a portion of the conductive posts 24,the first electronic component 20 and the first encapsulant 23 isremoved by grinding.

Referring to FIG. 2B, a first circuit structure 21 is disposed on thefirst surface 23 a of the first encapsulant 23 and the inactive surface20 b of the first electronic component 20 and electrically connected tothe conductive posts 24. In an embodiment, a plurality of firstconductive elements 25 are disposed on the first circuit structure 21.

In an embodiment, the first circuit structure 21 has at least a firstredistribution layer 210 electrically connected to the first ends 24 aof the conductive posts 24. In another embodiment, the firstredistribution layer 210 is made of copper.

Further, the first circuit structure 21 has at least an insulating layer(not shown). In an embodiment, the insulating layer is made of adielectric material, such as polybenzoxazole (PBO), polyimide orprepreg. A plurality of first redistribution layers 210 can be formed inthe insulating layer. Furthermore, the first circuit structure 21 has aninsulating layer 211, such as a solder mask layer, and the firstconductive elements 25 are exposed from the insulating layer 211.

In an embodiment, the first redistribution layer 210 is in contact withbut not electrically connected to the inactive surface 20 b of the firstelectronic component 20.

In an embodiment, the first conductive elements 25 are made of a soldermaterial, copper or other conductive material. The first conductiveelements 25 are electrically connected to the first redistribution layer210.

Referring to FIG. 2C, a second carrier 8 b is disposed on the firstcircuit structure 21. Then, the first carrier 8 a is removed to exposethe second surface 23 b of the first encapsulant 23, the second ends 24b of the conductive posts 24 and the active surface 20 a of the firstelectronic component 20.

In an embodiment, the second carrier 8 b includes a plate 82 made of,for example, a semiconductor material, a dielectric material, ceramic,glass or metal. In another embodiment, the second carrier 8 b can be awafer or full-panel type substrate according to the practical need.

The second carrier 8 b further includes a bonding layer 83 made of, forexample, a release film or an adhesive. The bonding layer 83 is formedon the plate 82 by coating or attachment and laminated on the firstcircuit structure 21. As such, the first conductive elements 25 areembedded in the bonding layer 83.

Further, the active surface 20 a of the first electronic component 20and the second ends 24 b of the conductive posts 24 are flush with thesecond surface 23 b of the first encapsulant 23.

Referring to FIG. 2D, an RDL (redistribution layer) process is performedto form a second circuit structure 22 on the second surface 23 b of thefirst encapsulant 23. The second circuit structure 22 is electricallyconnected to the electrode pads 200 of the first electronic component 20and the second ends 24 b of the conductive posts 24.

In an embodiment, the second circuit structure 22 has at least aninsulating layer 221 and at least a second redistribution layer 220formed on the second insulating layer 221. The outermost one of the atleast a second insulating layer 221 can serve as a solder mask layer,and the outermost one of the at least a second redistribution layer 220is exposed from the solder mask layer.

In an embodiment, the second redistribution layer 220 is made of copper,and the second insulating layer 221 is made of a dielectric material,such as PBO, polyimide or prepreg.

Referring to FIG. 2E, at least a second electronic component 26 isdisposed on the second circuit structure 22 and a second encapsulant 28is formed to encapsulate the second electronic component 26. Then, thesecond carrier 8 b is removed to expose the first conductive elements25.

In an embodiment, the second electronic component 26 is an activeelement, such as a semiconductor chip, a passive element, such as aresistor, a capacitor or an inductor, or a combination thereof. In anembodiment, the second electronic component 26 is a semiconductor chip,such as a graphics processing unit (GPU) or a high bandwidth memory(HBM).

Further, the second electronic component 26 is electrically connected tothe second redistribution layer 220 through a plurality of secondconductive elements 27, such as solder bumps or copper bumps. Both thesecond electronic component 26 and the second conductive elements 27 areencapsulated by the second encapsulant 28.

In an embodiment, the second encapsulant 28 is made of an insulatingmaterial, such as polyimide, a dry film, an epoxy resin or a moldingcompound. The second encapsulant 28 is formed on the second circuitstructure 22 through lamination or molding. It should be noted that thesecond encapsulant 28 can be made of a material that is the same as ordifferent from that of the first encapsulant 23.

In an embodiment, an underfill 29 is formed between the secondelectronic component 26 and the second circuit structure 22 toencapsulate the second conductive elements 27, and then the secondencapsulant 28 is formed to encapsulate the underfill 29 and the secondelectronic component 26.

Referring to FIG. 2F, a singulation process is performed to obtain anelectronic package 2. Subsequently, the electronic package 2 can bedisposed on a circuit board (not shown) through the first conductiveelements 25.

According to the present disclosure, since the first electroniccomponent 20 and the second electronic component 26 are arranged onupper and lower sides of the second circuit structure 22, respectively,the electronic package 2 can provide multi-function and high efficiency.

FIGS. 3A to 3D are schematic cross-sectional views showing a method forfabricating an electronic package 3 according to a second embodiment ofthe present disclosure. The second embodiment differs from the firstembodiment in the fabrication order of the first circuit structure andthe first conductive elements.

As shown in FIG. 3A′, a first circuit structure 31 is formed on acarrying board (not shown) first, and a plurality of first conductiveelements 35 are disposed on the other side of the first circuitstructure 31 that is not in contact with the carrying board. Then, thefirst circuit structure 31 is flipped over, the first circuit structure31 and the first conductive elements 35 are combined on a carrier 9, andthe carrying board is removed. The first circuit structure 31 has afirst side 31 a and a second side 31 b opposite to the first side 31 a.A plurality of first conductive elements 35 are disposed on the firstside 31 a of the first circuit structure 31 and bonded to the carrier 9.Then, as shown in FIG. 3A, a plurality of conductive posts 24 aredisposed on the second side 31 b of the first circuit structure 31 andelectrically connected to the first circuit structure 31, and a firstelectronic component 20 is disposed on the second side 31 b of the firstcircuit structure 31.

In an embodiment, the first circuit structure 31 has at least a firstinsulating layer 311 and a first redistribution layer 310 formed on thefirst insulating layer 311. In an embodiment, the first redistributionlayer 310 is made of copper and the first insulating layer 311 is madeof a dielectric material, such as PBO, polyimide or prepreg.

The carrier 9 includes a plate 90 made of, for example, a semiconductormaterial, a dielectric material, ceramic, glass or metal. In anembodiment, the carrier 9 can be a wafer or full-panel type substrateaccording to the practical need. In an embodiment, the carrier 9 furtherincludes a bonding layer 91 made of, for example, a release film or anadhesive. The bonding layer 91 is formed on the plate 90 by coating orattachment and the first circuit structure 31 is laminated on thebonding layer 91. As such, the first conductive elements 35 are embeddedin the bonding layer 91.

The conductive posts 24 are disposed on and electrically connected tothe first redistribution layer 310. The conductive posts 24 are made ofa metal material, such as copper or a solder material.

Further, the first electronic component 20 is attached to the secondside 31 b of the first circuit structure 31 through an adhesive layer300. A protection film 301, such as a passivation film, is formed on theactive surface 20 a of the first electronic component 20, and aplurality of electrode pads 200 of the active surface 20 a are exposedfrom the protection film 301. Furthermore, a plurality of conductors 30are formed on and electrically connected to the electrode pads 200 ofthe first electronic component 20 and protrude from the protection film301. In an embodiment, each of the conductors 30 has a ball shape, suchas a solder ball, a post shape, such as a copper post or a solder bump,or a stud shape formed by a wire bonder.

Referring to FIG. 3B, a first encapsulant 23 is formed on the secondside 31 b of the first circuit structure 31 to encapsulate the firstelectronic component 20, the conductors 30 and the conductive posts 24,such that the first electronic component 20, the conductors 30 and theconductive posts 24 are embedded in the first encapsulant 23. In anembodiment, the first circuit structure 31 and the first conductiveelements 35 are formed prior to the embedding of the first electroniccomponent 20 and the conductive posts 24. Then, a leveling process isperformed to cause the second surface 23 b of the first encapsulant 23to be flush with the second ends 24 b of the conductive posts 24 and theend surfaces of the conductors 30, thus exposing the second ends 24 b ofthe conductive posts 24 and the end surfaces of the conductors 30 fromthe first encapsulant 23.

In an embodiment, the first encapsulant 23 is made of an insulatingmaterial, such as an epoxy resin. The first encapsulant 23 is formed onthe second side 31 b of the first circuit structure 31 throughlamination or molding.

Further, during the leveling process, a portion of the conductive posts24, the conductors 30 and the first encapsulant 23 is removed bygrinding.

Referring to FIG. 3C, a second circuit structure 22 is disposed on thesecond surface 23 b of the first encapsulant 23 and electricallyconnected to the conductive posts 24 and the conductors 30. Then, atleast a second electronic component 26 is disposed on the second circuitstructure 22 through a plurality of second conductive elements 27, suchas solder balls, and a second encapsulant 28 is formed to encapsulatethe second electronic component 26 and the second conductive elements27.

In an embodiment, a UMB (under bump metallurgy) layer 32 is formed onthe outermost second redistribution layer 220 to facilitate the bondingbetween the second redistribution layer 220 and the conductive elements27.

In an embodiment, an underfill 29 of the first embodiment can be formedbetween the second electronic component 26 and the second circuitstructure 22 to encapsulate the second conductive elements 27 and thenthe second encapsulant 28 is formed to encapsulate the underfill 29 andthe second electronic component 26.

Referring to FIG. 3D, the carrier 9 is removed to expose the firstconductive elements 35. Then, a singulation process is performed toobtain an electronic package 3. Subsequently, the electronic package 3can be disposed on a circuit board (not shown) through the firstconductive elements 35 thereof.

As shown in FIGS. 3A to 3D, the first circuit structure 31 and the firstconductive elements 35 are formed, and the second circuit structure 22is formed so as for the second electronic component 26 to be disposedthereon. Therefore, the first electronic component 20 and the secondelectronic component 26 are arranged on the upper and lower sides of thesecond circuit structure 22, respectively. As such, the electronicpackage 3 can provide multi-function and high efficiency.

FIGS. 4A to 4D are schematic cross-sectional views showing a method forfabricating an electronic package 4 according to a third embodiment ofthe present disclosure. The third embodiment differs from the secondembodiment in the process of a packaging substrate.

Referring to FIG. 4A, continued from FIG. 3B, a second circuit structure22 is disposed on the second surface 23 b of the first encapsulant 23and electrically connected to the conductive posts 24 and the conductors30.

Referring to FIG. 4B, the carrier 9 is removed to expose the firstconductive elements 35, and a singulation process is performed to obtaina package structure 4 a.

Referring to FIG. 4C, the package structure 4 a is disposed on apackaging substrate 40 through the first conductive elements 35.

In an embodiment, the packaging substrate 40 has on an upper sidethereof a plurality of conductive pads 400 bonded to the firstconductive elements 35, and a plurality of solder balls 41 are plantedon a lower side of the packaging substrate 40 during a ball plantingprocess.

Further, a strengthening element 44, such as a metal frame, can bedisposed on the packaging substrate 40 so as to avoid stressconcentration and prevent the packaging substrate 40 from warping.

Referring to FIG. 4D, at least a second electronic component 26 isdisposed on the second circuit structure 22 through a plurality ofsecond conductive elements 27 and a second encapsulant 28 is formed toencapsulate the second electronic component 26. As such, an electronicpackage 4 is obtained. Subsequently, the electronic package 4 can bedisposed on a circuit board (not shown) through the solder balls 41 onthe lower side of the packaging substrate 40.

In an embodiment, an underfill 29 of the first embodiment can be formedbetween the second electronic component 26 and the second circuitstructure 22 to encapsulate the second conductive elements 27, and thenthe second encapsulant 28 is formed to encapsulate the underfill 29 andthe second electronic component 26.

As shown in FIGS. 4A to 4D, the first circuit structure 31 and the firstconductive elements 35 are formed so as for the packaging substrate 40to be disposed thereon, and the second circuit structure 22 is formed soas for the second electronic component 26 to be disposed thereon.Therefore, the first electronic component 20 and the second electroniccomponent 26 are arranged on the upper and lower sides of the secondcircuit structure 22, respectively. As such, the electronic package 4can provide multi-function and high efficiency.

The present disclosure further provides an electronic package 2, 3, 4,which has: a first encapsulant 23 having a first surface 23 a and asecond surface 23 b opposite to the first surface 23 a; at least a firstelectronic component 20 embedded in the first encapsulant 23; aplurality of conductive posts 24 embedded in the first encapsulant 23; afirst circuit structure 21, 31 disposed on the first surface 23 a of thefirst encapsulant 23 and electrically connected to the conductive posts24; a plurality of first conductive elements 25, 35 disposed on thefirst circuit structure 21, 31; a second circuit structure 22 disposedon the second surface 23 b of the first encapsulant 23 and electricallyconnected to the conductive posts 24 and the first electronic component20; and at least a second electronic component 26 disposed on andelectrically connected to the second circuit structure 22.

In an embodiment, each of the conductive posts 24 has a first end 24 aand a second end 24 b opposite to the first end 24 a, and surfaces ofthe first ends 24 a of the conductive posts 24 are flush with the firstsurface 23 a of the first encapsulant 23, or surfaces of the second ends24 b of the conductive posts 24 are flush with the second surface 23 bof the first encapsulant 23.

In an embodiment, the first electronic component 20 has an activesurface 20 a and an inactive surface 20 b opposite to the active surface20 a. The active surface 20 a of the first electronic component 20 isflush with the first surface 23 a of the first encapsulant 23, or theinactive surface 20 b of the first electronic component 20 is flush withthe second surface 23 b of the first encapsulant 23.

In an embodiment, the first circuit structure 21, 31 is electricallyconnected to the first conductive elements 25, 35.

In an embodiment, the first circuit structure 21, 31 is free from beingelectrically connected to the first electronic component 20.

In an embodiment, the first electronic component 20 is electricallyconnected to the second circuit structure 22 through a plurality ofconductors 30.

In an embodiment, the second electronic component 26 is disposed on thesecond circuit structure 22 through a plurality of second conductiveelements 27.

In an embodiment, the electronic package 2, 3, 4 further has a secondencapsulant 28 formed on the second circuit structure 22 forencapsulating the second electronic component 26.

In one embodiment, the electronic package 4 further has a packagingsubstrate 40 disposed on the first conductive elements 35.

According to the present disclosure, since the first electroniccomponent and the second electronic component are arranged on the upperand lower sides of the second circuit structure, respectively, theelectronic package can provide multi-function and high efficiency.

The above-described descriptions of the detailed embodiments are only toillustrate the preferred implementation according to the presentdisclosure, and it is not to limit the scope of the present disclosure.Accordingly, all modifications and variations completed by those withordinary skill in the art should fall within the scope of presentdisclosure defined by the appended claims.

What is claimed is:
 1. An electronic package, comprising: a firstencapsulant having a first surface and a second surface opposite to thefirst surface; a first electronic component embedded in the firstencapsulant; a plurality of conductive posts embedded in the firstencapsulant; a first circuit structure disposed on the first surface ofthe first encapsulant and electrically connected to the conductiveposts; a plurality of first conductive elements disposed on the firstcircuit structure; a second circuit structure disposed on the secondsurface of the first encapsulant and electrically connected to theconductive posts and the first electronic component; and a secondelectronic component disposed on and electrically connected to thesecond circuit structure.
 2. The electronic package of claim 1, whereinthe conductive posts have end surfaces flush with at least one of thefirst surface and the second surface of the first encapsulant.
 3. Theelectronic package of claim 1, wherein the first electronic componenthas a surface flush with at least one of the first surface and thesecond surface of the first encapsulant.
 4. The electronic package ofclaim 1, further comprising a second encapsulant formed on the secondcircuit structure and encapsulating the second electronic component. 5.The electronic package of claim 1, wherein the first circuit structureis free from being electrically connected to the first electroniccomponent.
 6. The electronic package of claim 1, further comprising aplurality of second conductive elements disposed on the second circuitstructure, wherein the second electronic component is disposed on thesecond circuit structure through the second conductive elements.
 7. Theelectronic package of claim 6, further comprising an underfill formedbetween the second circuit structure and the second electronic componentand encapsulating the second conductive elements.
 8. The electronicpackage of claim 1, further comprising a plurality of conductorselectrically connecting the first electronic component to the secondcircuit structure.
 9. The electronic package of claim 1, furthercomprising a packaging substrate disposed on the first conductiveelements.
 10. A method for fabricating an electronic package,comprising: providing a first encapsulant having a first surface and asecond surface opposite to the first surface and embedding a firstelectronic component and a plurality of conductive posts in the firstencapsulant; disposing a first circuit structure on the first surface ofthe first encapsulant and electrically connecting the first circuitstructure to the conductive posts; disposing a plurality of firstconductive elements on the first circuit structure; disposing a secondcircuit structure on the second surface of the first encapsulant andelectrically connecting the second circuit structure to the conductiveposts and the first electronic component; and disposing a secondelectronic component on the second circuit structure and electricallyconnecting the second electronic component to the second circuitstructure.
 11. The method of claim 10, wherein the conductive posts haveend surfaces flush with at least one of the first surface and the secondsurface of the first encapsulant.
 12. The method of claim 10, whereinthe first electronic component has a surface flush with at least one ofthe first surface and the second surface of the first encapsulant. 13.The method of claim 10, further comprising forming on the second circuitstructure a second encapsulant encapsulating the second electroniccomponent.
 14. The method of claim 10, wherein the first circuitstructure is free from being electrically connected to the firstelectronic component.
 15. The method of claim 10, wherein the secondelectronic component is disposed on the second circuit structure througha plurality of second conductive elements.
 16. The method of claim 15,further comprising forming between the second circuit structure and thesecond electronic component an underfill encapsulating the secondconductive elements.
 17. The method of claim 10, further comprisingdisposing on the first electronic component a plurality of conductorselectrically connecting the first electronic component to the secondcircuit structure.
 18. The method of claim 10, further comprising, priorto disposing the second electronic component on the second circuitstructure, disposing a packaging substrate on the first conductiveelements.